SCIESCOPUSQ3
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, United States
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING is an academic journal published by IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC (United States). Identifiers: ISSN 0894-6507, eISSN 1558-2345. Indexed in SCIE, SCOPUS. Metrics: JIF 2.3, CiteScore 4.5, SJR 0.670, SNIP 1.25. Subject areas: APPLIED, CONDENSED MATTER, ELECTRICAL & ELECTRONIC, ENGINEERING. tlooto lists 2,501 papers from this journal.
CiteScore
4.50
Scopus citation metric
SJR
0.670
SCImago rank
SNIP
1.25
Source normalized impact
Percentage rank
-
JIF percentile rank
Journal profile
- ISSN
- 0894-6507
- eISSN
- 1558-2345
- Abbreviation
- IEEE T SEMICONDUCT M
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Country
- United States
Web of Science categories
SCIEAPPLIED, CONDENSED MATTER, ELECTRICAL & ELECTRONIC, ENGINEERING, MANUFACTURING, PHYSICS
Scopus ASJC categories
2208 Electrical and Electronic Engineering2209 Industrial and Manufacturing Engineering2504 Electronic3104 Condensed Matter Physics
Keywords
Engineering, Manufacturing | Engineering, Electrical & Electronic | Physics, Applied | Physics, Condensed Matter
Papers in this journal
Recent papers
- Analyzing the Impact of Inclined Airflow Within the EFEM on the Lateral Flow Around the FOUP Using Flow Visualization Techniques
2026
- Modeling and Scheduling of Dual-Arm Cluster Tools With Multifunctional Process Modules
2026 · 1 citations
- Suppressing Hexagonal Defects in Ex Situ Remote Plasma Dry Etch Processing
2026
- Online Temperature Monitoring System for Semiconductor Automated Test Equipment Using Local Gaussian Process
2026
- A Condition Monitoring Method via a New Signal Expansion Strategy for the Crystal Lifting and Rotating Mechanism
2026
Most cited papers
- Material removal mechanism in chemical mechanical polishing: theory and modeling
2001 · 648 citations
- Scheduling semiconductor wafer fabrication
1988 · 644 citations
- Fault Detection Using the k-Nearest Neighbor Rule for Semiconductor Manufacturing Processes
2007 · 450 citations
- VARIUS: A Model of Process Variation and Resulting Timing Errors for Microarchitects
2008 · 432 citations
- Efficient scheduling policies to reduce mean and variance of cycle-time in semiconductor manufacturing plants
1994 · 406 citations