SCIESCOPUSQ4
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
A V S AMER INST PHYSICS, United States
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B is an academic journal published by A V S AMER INST PHYSICS (United States). Identifiers: ISSN 2166-2746, eISSN 2166-2754. Indexed in SCIE, SCOPUS. Metrics: JIF 1.2, CiteScore 2.4, SJR 0.280, SNIP 0.67. Subject areas: APPLIED, ELECTRICAL & ELECTRONIC, ENGINEERING, NANOSCIENCE & NANOTECHNOLOGY. tlooto lists 15,808 papers from this journal.
CiteScore
2.40
Scopus citation metric
SJR
0.280
SCImago rank
SNIP
0.67
Source normalized impact
Percentage rank
-
JIF percentile rank
Journal profile
- ISSN
- 2166-2746
- eISSN
- 2166-2754
- Abbreviation
- J VAC SCI TECHNOL B
- Publisher
- A V S AMER INST PHYSICS
- Country
- United States
Web of Science categories
SCIEAPPLIED, ELECTRICAL & ELECTRONIC, ENGINEERING, NANOSCIENCE & NANOTECHNOLOGY, PHYSICS
Scopus ASJC categories
15082208 Electrical and Electronic Engineering2504 Electronic2505 Materials Chemistry2508 Surfaces3105 Instrumentation
Keywords
Engineering, Electrical & Electronic | Nanoscience & Nanotechnology | Physics, Applied
Papers in this journal
Recent papers
- Temperature-dependent dielectric function of tantalum nitride formed by atomic layer deposition for tunnel barriers in Josephson junctions
2026
- Mechanisms of stress control in SiNx membranes under gas cluster ion beam irradiation
2026
- ContaminationFlow: A Molflow+-based test-particle Monte-Carlo code for simulating contamination transfer under molecular flow conditions
2026
- Low-temperature hybrid bonding using sequential ArH2 and ArH2N2 low-inductance antenna plasma-assisted activation
2026
- Tandem mass spectrometry dissociation of large oligomer ions produced by argon cluster ion beams secondary ion mass spectrometry
2026
Most cited papers
- GaN, AlN, and InN: A review
1992 · 2,498 citations
- Band offsets of wide-band-gap oxides and implications for future electronic devices
2000 · 1,927 citations
- Mechanical properties of suspended graphene sheets
2007 · 1,145 citations
- Gas-assisted focused electron beam and ion beam processing and fabrication
2008 · 998 citations
- Critical Review: Adhesion in surface micromechanical structures
1997 · 815 citations