Silicon Nanostructures and PhotoluminescenceSilicon and Solar Cell TechnologiesVacuum and Plasma Arcs

Kornev Roman, Bulanov Andrey

2026.5.22PLASMA CHEMISTRY AND PLASMA PROCESSING

DOI: 10.1007/s11090-026-10671-7

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साइटेशन फॉर्मेट

ROMAN, Kornev; ANDREY, Bulanov. Application of ICP plasma for obtaining chemically and isotopically pure silicon. PLASMA CHEMISTRY AND PLASMA PROCESSING, 2026, 46(4).