Room-Temperature Mid-Wave Infrared Guided Mode Resonance Photodetectors for Focal Plane Arrays

We demonstrate room-temperature mid-wave infrared photodetectors leveraging guided mode resonances for photonic enhancement, operating in an epi-side-down, substrate-side illuminated configuration. Detectors are fabricated with 1D- and 2D-grating guided mode resonance structures and show low dark current at room-temperature, and strong enhancement in external quantum efficiency and detectivity. Guided mode resonance detectors with 2D gratings are demonstrated to have reduced spectral distortion for a broad range of incidence angles. The detectors presented here offer a compelling path forward for implementing resonantly enhanced detectors into MWIR focal plane arrays and imagers.