Advanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsInnovative Energy Harvesting Technologies
Pengfei Zhang, Chengyu Wang, Xiong Cheng, Zhikang Lan, Xiangkun Jiao, Zechun Dou, Jiang Guo, Can Chen, Xiaobo Li, Weiping Li, Daying Sun, Xiaodong Huang
Abstract
Abstract is not available.
Citation format
ZHANG, Pengfei, et al. A MEMS piezoresistive micro-pressure sensor with ultra-low nonlinearity over a wide operating temperature range. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2026, 35(3): 504–511.