Electrodeposition and Electroless CoatingsCopper Interconnects and Reliability3D IC and TSV technologies

Decheng Li, Xiaodong Li, Jianyu Liu, Yi Wang, Qian Wang, Yilei Yue, Song Lin, Linan Xu, Shirong Wang

2026.8.1Computational and Theoretical Chemistry

DOI: 10.1016/j.comptc.2026.115858

Abstract

Abstract is not available.

Citation format

LI, Decheng, et al. Chain length effect of accelerators in TSV/TGV microvia copper filling: A combined DFT and MD simulation study. Computational and Theoretical Chemistry, 2026, 1262: 115858.