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Electron and X-Ray Spectroscopy TechniquesAdvanced Electron Microscopy Techniques and ApplicationsSilicon and Solar Cell Technologies

Investigation into the influence of sample temperature on electron beam width in SEM through Monte-Carlo simulation

Peng Zhang

2026.3.9APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING

DOI: 10.1007/s00339-026-09474-6

Abstract

Abstract is not available.

Citation format

ZHANG, Peng. Investigation into the influence of sample temperature on electron beam width in SEM through monte-carlo simulation. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2026, 132(4).