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Laser Material Processing TechniquesLaser-Ablation Synthesis of NanoparticlesSilicon Nanostructures and Photoluminescence

Mechanisms of reactive medium-assisted laser ablation of thermally active materials: a case study of hydrochloric film-assisted laser machining of microchannel arrays on AlN

Jiawei Liu, Ni Chen, Kaixuan Feng, Qi Liu, Yong Xu, Xiang Li, Eberhard Abele, Ning He

2026.4.1INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE

DOI: 10.1016/j.ijmachtools.2026.104388

Abstract

Abstract is not available.

Citation format

LIU, Jiawei, et al. Mechanisms of reactive medium-assisted laser ablation of thermally active materials: A case study of hydrochloric film-assisted laser machining of microchannel arrays on aln. INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2026, 217: 104388.