Ion-surface interactions and analysisSilicon and Solar Cell TechnologiesAdvanced Materials and Semiconductor Technologies

Erratum to: Study of the Influence of the Energy of Argon Ions on the Surface Roughness of the Main Sections of Single-Crystal Silicon

M. Mikhailenko, A. Pestov, A. K. Chernyshev, M. Zorina, N. I. Chkhalo, N. N. Salaschenko

2026.2.9TECHNICAL PHYSICS

DOI: 10.1134/s1063784226010019

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引用形式

MIKHAILENKO, M., et al. Erratum to: Study of the influence of the energy of argon ions on the surface roughness of the main sections of single-crystal silicon. TECHNICAL PHYSICS, 2026, 71(1): 45.