Gas Sensing Nanomaterials and SensorsElectrical and Thermal Properties of MaterialsTransition Metal Oxide Nanomaterials

Design and Fabrication of a High-Temperature Stable, Low-Power Microheater for Semiconductor Gas Sensors

Jun-Hyeok Lee, T. Ha, Chil-Hyoung Lee, Dong-weon Lee

2026.1.31Journal of Sensor Science and Technology

DOI: 10.46670/jsst.2026.35.1.22

Abstract

Abstract is not available.

Citation format

LEE, Jun-Hyeok, et al. Design and fabrication of a high-temperature stable, low-power microheater for semiconductor gas sensors. Journal of Sensor Science and Technology, 2026, 35(1): 22–29.