PHYSICO-MECHANICAL PROPERTIES OF ARC-PVD NANOSTRUCTURED TA-TI-N COATINGS

Ta-Ti-N coatings obtained by vacuum-arc deposition have been investigated. The structure and chemical composition of the coatings were investigated by scanning electron microscopy (SEM) and energy dispersive spectroscopy (EDS). The microhardness of the vacuum-arc Ta-Ti-N coating Hi = 24.12 GPa and the elastic modulus E = 283.47 GPa were determined. The Н3 /Е2 index is 0.175, which indicates a high resistance of the coating to plastic deformation. The main increase in hardness is due to the TiN phase. The protective wear-resistant Ta-Ti-N coating due to high physical-mechanical properties is promising for deposition on various surfaces used in industry and for elements of gas turbine engines.