Terahertz on-chip devices based on metachips

Terahertz (THz) technology has garnered significant attention in recent years due to its wide-ranging applications in communication, sensing, imaging, and spectroscopy. A prominent trend in this field is the development of miniaturized and functional THz devices that can be implemented on a chip scale. This review provides a comprehensive analysis of the current advancement in THz on-chip devices, emphasizing the role of metachips. It first introduces the spoof plasmonic metachips, which enables low-loss transmission and frequency selection. Then, it covers microstructure resonance metachips, which can reduce complexity. Finally, it discusses the application of metachips in THz system and integration, highlighting their potential in CMOS-based communication and high-density chip-scale interconnects. The review aims to inspire research and guide the development of next-generation THz devices.