Nanofabrication and Lithography TechniquesMicrofluidic and Capillary Electrophoresis ApplicationsInjection Molding Process and Properties

Mert Gülcur, Zoe Vo, Xiangyu Gao, James Garcia, Barbara Groh, Luis Arturo Aguirre, Gregory Gibbons, Michael Cullinan

2026.1.14Journal of Micro and Nano-Manufacturing

DOI: 10.1115/1.4070897

Abstract

Fabrication of mould inserts using additive manufacturing (AM) or 3D-printing is generalised as rapid-tooling and offers great design flexibility and potential for rapid prototyping using injection and micro-injection moulding. In miniature scales, established additive manufacturing methods such as material jetting and stereolithography usually suffers from surface quality defects and lack of sufficient precision and accuracy for true-microscale moulds and components. Current work demonstrates a process chain where material jetting and ultraviolet light-emitting diode (UV-LED) photolithography are combined to create precise and accurate microstructures on 3D-printed and planarised rapid-tools for microfluidic applications. The planarisation step involved spin-coating with 3D-printed resins to obtain a flat surface, followed by a custom-made UV-LED mask lithography step for inducing microchannels on the planarised inserts, using non-contact and contact modes. The process repeatability was characterised by varying revolutions per minute (RPM) and laser-scanning confocal microscopy of key dimensional features. The results showed that higher RPM values are favourable for obtaining better surface quality and repeatability. Obtained micro-features were compared with directly-printed micro-features using a material jetting printer and significant improvements were reported in the repeatability of surface roughness metrics, with up to 50% lower coefficient of variations. This novel process offers a viable method for creating highly precise and accurate prototyping moulds and is expected to be impactful for the accelerated iterations of microfluidic devices.

Citation format

GÜLCUR, Mert, et al. Microfabrication of rapid micro-moulds for microfluidics combining additive manufacturing and a custom ultraviolet-led photolithography tool. Journal of Micro and Nano-Manufacturing, 2026, 14(1).