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Advanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques

Plasma-assisted polishing with silicon and silica plates: Comparison of interaction mechanism and achievement of atomically flat surfaces on single- and polycrystalline diamond

Jiayuan Dong, Sota Sugihara, K. Fujiwara, Rongyan Sun, Yuji Ohkubo, Junsha Wang, Tadatomo Suga, Kazuya Yamamura

2026.2.1JOURNAL OF MATERIALS PROCESSING TECHNOLOGY

DOI: 10.1016/j.jmatprotec.2025.119187

Abstract

Abstract is not available.

Citation format

DONG, Jiayuan, et al. Plasma-assisted polishing with silicon and silica plates: Comparison of interaction mechanism and achievement of atomically flat surfaces on single- and polycrystalline diamond. JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2026, 348: 119187.