LTCC-Based Sensors for Mechanical Quantities
U. Partsch, C. Lenz, S. Ziesche, Carolin Lohrberg, H. Neubert, T. Maeder
2012INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS
tlooto Summary
This 2012 paper describes LTCC-based sensors for mechanical quantities, covering material and technological aspects, as well as design processes and application examples.
Abstract
Besides their excellent dielectric and thermo-mechanical characteristics Low Temperature Cofiring Ceramics (LTCC) are also well suited for the fabrication of 3D micromechanical components such as sensors for mechanical quantities. This paper describes the development of such sensors covering some material and technological aspects. Furthermore, the design process for mechanical sensors is discussed as well as application examples of sensors for the detection of pressure, force, acceleration and flow.
Citation format
PARTSCH, U., et al. LTCC-Based sensors for mechanical quantities. INFORMACIJE MIDEM-JOURNAL OF MICROELECTRONICS ELECTRONIC COMPONENTS AND MATERIALS, 2012, 42: 260–271.