EngineeringMaterials ScienceComputer Science

Silicon fusion bonding for fabrication of sensors, actuators and microstructures

P. Barth

1990.4.1JOURNAL OF SYSTEMS ARCHITECTURE

DOI: 10.1016/0924-4247(90)87060-v

tlooto Summary

A mining machine is provided with a lock for the starting device, the lock being withdrawn by a piston and cylinder operated by a bleed from the dust suppression fluid supply, and a restriction is provided in the bleed for causing a delay in the withdrawal of the lock.

Abstract

Abstract is not available.

Citation format

BARTH, P. Silicon fusion bonding for fabrication of sensors, actuators and microstructures. JOURNAL OF SYSTEMS ARCHITECTURE, 1990.