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EngineeringPhysicsMaterials Science

Failure analysis of shallow trench isolated ESD structures

J. Never, S. Voldman

1996.10.1Electrical Overstress/Electrostatic Discharge Symposium Proceedings

DOI: 10.1016/s0304-3886(96)00012-5

Abstract

Abstract is not available.

Citation format

NEVER, J.; VOLDMAN, S. Failure analysis of shallow trench isolated ESD structures. Electrical Overstress/Electrostatic Discharge Symposium Proceedings, 1996: 273–288.