Broadband Dielectric Characterization of Aluminum Oxide (Al2O3)

Applications for low-temperature cofired ceramics (LTCC) and high-temperature cofired ceramics (HTCC) are advancing to higher frequencies. In order to design ceramic microsystems and electronic packages, the electrical properties of materials must be well characterized over a broad frequency range. In this study, the dielectric properties of commercial aluminum oxide (Al2O3) with different glass loadings are characterized using three different measurement techniques: the split-post cavity, terahertz (THz) time-domain spectroscopy, and Fourier transform IR spectroscopy (FTIR). Specifically, the dielectric properties will be characterized from 10 GHz to IR frequencies. A split-post cavity was employed for determination of dielectric properties in the 10 GHz range. A broadband THz spectroscopy technique was used to characterize the specimens using measured time-domain transmission data. The dielectric constant and loss were extracted from the sample's frequency-domain transmission characteristics, providing ...