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Open AccessMaterials ScienceEngineering

Design of Compliant Mechanisms: Applications to MEMS

S. Kota, Jinyong Joo, Zhe Li, S. Rodgers, J. Sniegowski

2001.10.15ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING

DOI: 10.1023/A:1011265810471

Abstract

Abstract is not available.

Citation format

KOTA, S., et al. Design of compliant mechanisms: Applications to MEMS. ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING, 2001, 29: 7–15.