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EngineeringPhysicsMaterials Science

Nanolithography in microelectronics: A review

R. Seisyan

2011.8.6TECHNICAL PHYSICS

DOI: 10.1134/s1063784211080214

Résumé

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Format de citation

SEISYAN, R. Nanolithography in microelectronics: A review. TECHNICAL PHYSICS, 2011, 56: 1061–1073.