Open AccessMaterials ScienceEngineeringPhysics

O. Filatov

2016.3.15Functional Materials

DOI: 10.15407/fm23.01.104

Abstract

Abstract is not available.

Citation format

FILATOV, O. Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics. Functional Materials, 2016, 23: 104–110.