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Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review

Surender Kumar, B. D. Pant

2014.5.24MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

DOI: 10.1007/s00542-014-2215-7

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Zitationsformat

KUMAR, Surender; PANT, B. D. Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: A focused review. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2014, 20: 1213–1247.