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Linear Standard for SEM–AFM Microelectronics Dimensional Metrology in the Range 0.01–100 μm

C. Volk, E. Gornev, Y. Novikov, Yu. V. Ozerin, Yu. I. Plotnikov, A. Prokhorov, A. Rakov

2002.7.1Russian Microelectronics

DOI: 10.1023/a:1016384612327

tlooto Summary

A trapezoidal pitch structure is proposed, in which the sidewalls of basic units essentially make a large angle with the normal to the surface, for use in SEM–AFM dimensional metrology.

Abstract

Abstract is not available.

Citation format

VOLK, C., et al. Linear standard for SEM–AFM microelectronics dimensional metrology in the range 0.01–100 μm. Russian Microelectronics, 2002, 31: 207–223.