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Open AccessMaterials ScienceEngineering

Mold Surface Treatment for Imprint Lithography.

Y. Hirai, S. Yoshida, A. Okamoto, Yoshio Tanaka, M. Endo, S. Irie, H. Nakagawa, M. Sasago

2001JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY

DOI: 10.2494/photopolymer.14.457

Abstract

Abstract is not available.

Citation format

HIRAI, Y., et al. Mold surface treatment for imprint lithography. JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2001, 14: 457–462.