オープンアクセスEngineeringPhysics

IC-processed electrostatic micro-motors

L. Fan, Y. Tai, R. Muller

DOI: 10.1109/iedm.1988.32901

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FAN, L.; TAI, Y.; MULLER, R. IC-processed electrostatic micro-motors. Technical Digest - International Electron Devices Meeting, 1988: 666–669.