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Open AccessMaterials ScienceEngineering

Effect of thermal and deposition processes on surface morphology, crystallinity, and adhesion of Parylene-C

Jui-Mei Hsu, L. Rieth, S. Kammer, M. Orthner, F. Solzbacher

2008SENSORS AND MATERIALS

DOI: 10.18494/sam.2008.515

Abstract

Abstract is not available.

Citation format

HSU, Jui-Mei, et al. Effect of thermal and deposition processes on surface morphology, crystallinity, and adhesion of parylene-c. SENSORS AND MATERIALS, 2008, 20: 87–102.