EXPERIENCE IN THE SYNTHESIS OF DIAMOND FROM A SUPERSONIC MICROWAVE PLASMA JET

In this paper, the traditional method of microwave plasma generation is used in combination with the formation of a high-velocity plasma flow from a resonant chamber into an evacuated deposition chamber. In the experiments, a modernized magnetron with power up to 3 kW at a frequency of 2.45 GHz is used. The calculations of the microwave plasma formation process make, in practice, it possible to estimate the optimal geometry of the discharge chamber for an acceptable distribution of the electromagnetic field in the discharge region. The gas-dynamic calculations give an estimate of the approximate content of atomic hydrogen at the deposition surface. The results of the work determine ways for further research on the synthesis of diamond from high-speed microwave plasma jets.