SCIESCOPUSQ3
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
A V S AMER INST PHYSICS
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A is an academic journal published by A V S AMER INST PHYSICS. Identifiers: ISSN 0734-2101, eISSN 1520-8559. Indexed in SCIE, SCOPUS. Metrics: JIF 2.1, CiteScore 3.9, SJR 0.473, SNIP 0.77. Subject areas: APPLIED, COATINGS & FILMS, MATERIALS SCIENCE, PHYSICS. tlooto lists 2,271 papers from this journal.
CiteScore
3.90
Scopus citation metric
SJR
0.473
SCImago rank
SNIP
0.77
Source normalized impact
Percentage rank
-
JIF percentile rank
Journal profile
- ISSN
- 0734-2101
- eISSN
- 1520-8559
- Abbreviation
- J VAC SCI TECHNOL A
- Publisher
- A V S AMER INST PHYSICS
- Country
- -
Web of Science categories
SCIEAPPLIED, COATINGS & FILMS, MATERIALS SCIENCE, PHYSICS
Scopus ASJC categories
2508 Surfaces3104 Condensed Matter Physics3110 Surfaces and Interfaces
Keywords
Materials Science, Coatings & Films | Physics, Applied
Papers in this journal
Recent papers
- Adsorption-controlled epitaxy and twin control of
γ
-GaSe on GaAs (111)B
2026
- Physical approach to enhance the selectivity of SiO2 area-selective deposition using substrate biasing
2026
- Thank you to our 2025 reviewers!
2026
- Ohmic contact formation on n-type β-Ga2O3: Comparative analysis of Ti/Au and ITO/Ti/Au metallization schemes
2026
- Dependence of the Mn sticking coefficient on Ga-rich, N-rich, and Ga/N-flux-free conditions in GaN grown by plasma-assisted molecular beam epitaxy
2026
Most cited papers
- Practical guides for x-ray photoelectron spectroscopy (XPS): Interpreting the carbon 1s spectrum
2021 · 472 citations
- Introduction to x-ray photoelectron spectroscopy
2020 · 419 citations
- Practical guides for x-ray photoelectron spectroscopy: Quantitative XPS
2020 · 255 citations
- XPS guide: Charge neutralization and binding energy referencing for insulating samples
2020 · 226 citations
- Status and prospects of plasma-assisted atomic layer deposition
2019 · 171 citations