Dependence of the Mn sticking coefficient on Ga-rich, N-rich, and Ga/N-flux-free conditions in GaN grown by plasma-assisted molecular beam epitaxy

This brief report examines the influence of Ga/N flux conditions on Mn incorporation in GaN. Mn-doped GaN layers were grown at 680 °C by molecular beam epitaxy on a Ga-polar GaN(0001) template substrate under Ga-rich, N-rich, and no-flux conditions (i.e., Mn δ doping). Mn incorporation was the highest under an N-rich condition, lowest under a Ga-rich condition, and intermediate in the absence of Ga and N fluxes. For the growth conditions examined in this study, the corresponding Mn sticking coefficients, relative to that of the N-rich condition, were determined to be 0.31 for no-flux growth and 0.01 for the Ga-rich growth.